CPC H01L 22/14 (2013.01) [C23C 14/566 (2013.01); G01N 27/72 (2013.01); G01R 33/032 (2013.01); H10N 50/01 (2023.02)] | 20 Claims |
1. A film forming system for forming a magnetic film, comprising:
a processing module configured to form the magnetic film on a substrate;
a magnetization characteristic measuring device configured to measure magnetization characteristics of the magnetic film formed on the substrate in the processing module; and
a transfer unit configured to transfer the substrate between the processing module and the magnetization characteristic measuring device,
wherein the magnetization characteristic measuring device includes a magnetic field applying mechanism having a permanent magnet magnetic circuit configured to apply a magnetic field to the substrate and adjust the magnetic field to be applied to the substrate, and a detector configured to detect magnetization characteristics of the substrate.
|