US 11,715,667 B2
Thermal process chamber lid with backside pumping
Anqing Cui, Palo Alto, CA (US); Dien-Yeh Wu, San Jose, CA (US); Wei V. Tang, Santa Clara, CA (US); Yixiong Yang, Fremont, CA (US); and Bo Wang, Chandler, AZ (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 14, 2022, as Appl. No. 17/720,836.
Application 17/720,836 is a continuation of application No. 16/886,116, filed on May 28, 2020, granted, now 11,335,591.
Claims priority of provisional application 62/853,699, filed on May 28, 2019.
Prior Publication US 2022/0246471 A1, Aug. 4, 2022
Int. Cl. C23C 16/02 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01L 21/687 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H01L 23/532 (2006.01)
CPC H01L 21/76826 (2013.01) [C23C 16/02 (2013.01); C23C 16/4584 (2013.01); C23C 16/45553 (2013.01); H01L 21/0228 (2013.01); H01L 21/28568 (2013.01); H01L 21/4871 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H01L 21/76843 (2013.01); H01L 21/76861 (2013.01); H01L 21/76877 (2013.01); H01L 23/53266 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A process chamber lid assembly, comprising:
a housing enclosing a gas dispersion channel that extends along a central axis of the housing, the gas dispersion channel having an upper portion and a lower portion;
a lid plate coupled to the housing and having a contoured bottom surface that extends downwardly and outwardly from a central opening coupled to the lower portion of the gas dispersion channel to a peripheral portion of the lid plate, the contoured bottom surface of the lid plate comprises an inner zone, a middle zone and an outer zone, the inner zone defined from a central axis of the lid plate to an inner zone radial distance from the central axis, the middle zone defined from the inner zone radial distance to a middle zone radial distance from the central axis, and the outer zone measured from the middle zone radial distance to an outer zone radial distance at an outer peripheral edge of the contoured bottom surface; and
a gas distribution plate disposed below the lid plate, the gas distribution plate having an upper outer peripheral contour configured to form a pumping channel between the gas distribution plate and the lid plate, the gas distribution plate having a top surface and a bottom surface with a plurality of apertures disposed through the gas distribution plate from the top surface to the bottom surface, the contoured bottom surface of the lid plate and top surface of the gas distribution plate defining a gap, the inner zone of the contoured bottom surface of lid having a larger gap than the middle zone of the contoured bottom surface of the lid, the middle zone of the contoured bottom surface of the lid having a larger gap than the outer zone of the contoured bottom surface of the lid, the outer zone is sloped from the middle zone to a front face of the lid plate forming an outer zone angle, the outer zone of the contoured bottom surface is connected to the pumping channel through pumping holes formed in the lid plate.