CPC H01L 21/6838 (2013.01) [B05C 21/005 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01); C23C 16/4585 (2013.01); H01L 21/02266 (2013.01); H01L 21/68721 (2013.01)] | 7 Claims |
1. A carrier assembly, comprising:
a mask, the mask including a pattern of openings disposed through the mask, the mask including pinholes;
a carrier, the carrier including:
a magnet disposed in the carrier, the magnet magnetically coupled to the mask;
a plurality of lips, a distance between adjacent lips of the plurality of lips corresponding to a substrate to be disposed on the adjacent lips of the plurality of lips;
a plurality of pins disposed through the plurality of lips, the plurality of pins operable to surround the substrate disposed on the adjacent lips of the plurality of lips; and
alignment pins disposed in the carrier and disposed through the pinholes in the mask, the alignment pins disposed through the plurality of lips.
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