US 11,715,662 B2
Actively clamped carrier assembly for processing tools
Benjamin B. Riordon, Newburyport, MA (US); and James D. Strassner, Austin, TX (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 11, 2020, as Appl. No. 17/119,382.
Prior Publication US 2022/0189815 A1, Jun. 16, 2022
Int. Cl. H01L 21/683 (2006.01); C23C 16/458 (2006.01); C23C 16/04 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01); B05C 21/00 (2006.01); C23C 14/04 (2006.01)
CPC H01L 21/6838 (2013.01) [B05C 21/005 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01); C23C 16/4585 (2013.01); H01L 21/02266 (2013.01); H01L 21/68721 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A carrier assembly, comprising:
a mask, the mask including a pattern of openings disposed through the mask, the mask including pinholes;
a carrier, the carrier including:
a magnet disposed in the carrier, the magnet magnetically coupled to the mask;
a plurality of lips, a distance between adjacent lips of the plurality of lips corresponding to a substrate to be disposed on the adjacent lips of the plurality of lips;
a plurality of pins disposed through the plurality of lips, the plurality of pins operable to surround the substrate disposed on the adjacent lips of the plurality of lips; and
alignment pins disposed in the carrier and disposed through the pinholes in the mask, the alignment pins disposed through the plurality of lips.