CPC H01L 21/6833 (2013.01) [H01B 1/02 (2013.01)] | 11 Claims |
1. A composite sintered body, comprising:
a base material using ceramics as a main material; and
an electrode disposed inside said base material or on a surface thereof,
wherein said electrode contains
tungsten carbide; and
titanium nitride, and
wherein an absolute value of the difference in thermal expansion coefficient between said electrode and said base material is not higher than 0.3 ppm/° C. within a range not lower than 40° C. and nut higher than 1000° C.
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