US 11,715,661 B2
Composite sintered body and method of manufacturing composite sintered body
Kyohei Atsuji, Nagoya (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Oct. 14, 2020, as Appl. No. 17/70,149.
Claims priority of application No. 2019-197719 (JP), filed on Oct. 30, 2019.
Prior Publication US 2021/0134639 A1, May 6, 2021
Int. Cl. H01B 1/02 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/6833 (2013.01) [H01B 1/02 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A composite sintered body, comprising:
a base material using ceramics as a main material; and
an electrode disposed inside said base material or on a surface thereof,
wherein said electrode contains
tungsten carbide; and
titanium nitride, and
wherein an absolute value of the difference in thermal expansion coefficient between said electrode and said base material is not higher than 0.3 ppm/° C. within a range not lower than 40° C. and nut higher than 1000° C.