US 11,715,657 B2
Substrate misalignment detection method, substrate position abnormality determination method, substrate transfer control method, and substrate misalignment detection device
Shinjiro Watanabe, Nirasaki (JP); and Koji Aramaki, Tokyo (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jan. 5, 2021, as Appl. No. 17/141,830.
Claims priority of application No. 2020-000894 (JP), filed on Jan. 7, 2020.
Prior Publication US 2021/0210366 A1, Jul. 8, 2021
Int. Cl. H01L 21/683 (2006.01); H01L 21/67 (2006.01); G06T 7/00 (2017.01); H01L 21/677 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/67259 (2013.01) [G06T 7/001 (2013.01); H01L 21/67742 (2013.01); H01L 21/6838 (2013.01); H01L 22/12 (2013.01); G06T 2207/30148 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A substrate misalignment detection method, comprising:
acquiring first image information or first position information of a substrate held to a stage by suction at a first height position;
delivering the substrate from the stage to a holder in a state in which the suction of the substrate is released and causing the holder to hold the substrate at the first height position;
acquiring second image information or second position information of the substrate held at the first height position; and
detecting misalignment of the substrate by comparing the first image information with the second image information or by comparing the first position information with the second position information.