CPC H01L 21/67259 (2013.01) [G06T 7/001 (2013.01); H01L 21/67742 (2013.01); H01L 21/6838 (2013.01); H01L 22/12 (2013.01); G06T 2207/30148 (2013.01)] | 18 Claims |
1. A substrate misalignment detection method, comprising:
acquiring first image information or first position information of a substrate held to a stage by suction at a first height position;
delivering the substrate from the stage to a holder in a state in which the suction of the substrate is released and causing the holder to hold the substrate at the first height position;
acquiring second image information or second position information of the substrate held at the first height position; and
detecting misalignment of the substrate by comparing the first image information with the second image information or by comparing the first position information with the second position information.
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