US 11,715,653 B2
Substrate processing apparatus
Byeonghoon Kim, Suwon-si (KR); Byunghwan Kong, Suwon-si (KR); Seungyong Bae, Suwon-si (KR); and Jaehyun An, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Nov. 25, 2019, as Appl. No. 16/694,213.
Claims priority of application No. 10-2019-0061238 (KR), filed on May 24, 2019.
Prior Publication US 2020/0373175 A1, Nov. 26, 2020
Int. Cl. H01L 21/67 (2006.01)
CPC H01L 21/67109 (2013.01) [H01L 21/6719 (2013.01); H01L 21/67115 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a process chamber;
a support part in the process chamber, the support part including a substrate loading region configured to support a substrate seated therein;
a heating part configured to heat the substrate loading region; and
a reflective member adjacent to the substrate loading region in the process chamber, the reflective member including a first plate and a second plate separated from each other in a vertical direction of the reflective member and a pair of side walls extending perpendicular to the first plate and the second plate with a sealed hollow portion therein that is sealed on all sides and extends parallel to an upper surface of the substrate loading region such that a distance the sealed hollow portion extends within the reflective member is greater in a horizontal direction than a distance the sealed hollow portion extends in the vertical direction, the second plate being closer to the support part than the first plate, and the sealed hollow portion being configured to reflect the heat absorbed by the reflective member back towards the second plate,
wherein the reflective member includes internal surfaces including a first internal surface, a second internal surface and an internal side surface defining the sealed hollow portion, the first internal surface facing the substrate loading region, the second internal surface opposing the first internal surface with the internal side surface connecting the first internal surface and the second internal surface,
wherein the reflective member includes a reflective material having a first reflectance, and
at least one of the first internal surface and the second internal surface includes a material having a second reflectance coated thereon with a distance between the first internal surface and the second internal surface that oppose each other in the vertical direction being between 1 mm and 10 mm, the second reflectance being higher than the first reflectance and the sealed hollow portion being vacuum sealed.