US 11,715,619 B2
Method and apparatus for charged particle detection
Yongxin Wang, San Ramon, CA (US); Weiming Ren, San Jose, CA (US); Zhonghua Dong, Sunnyvale, CA (US); and Zhongwei Chen, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Apr. 4, 2022, as Appl. No. 17/713,189.
Application 17/713,189 is a continuation of application No. 16/484,106, granted, now 11,295,930, previously published as PCT/EP2018/052480, filed on Feb. 1, 2018.
Claims priority of provisional application 62/577,129, filed on Oct. 25, 2017.
Claims priority of provisional application 62/455,674, filed on Feb. 7, 2017.
Prior Publication US 2022/0375716 A1, Nov. 24, 2022
Int. Cl. H01J 37/244 (2006.01); H01J 37/28 (2006.01); G01N 23/2251 (2018.01)
CPC H01J 37/244 (2013.01) [G01N 23/2251 (2013.01); H01J 37/28 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24507 (2013.01); H01J 2237/24578 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A non-transitory computer-readable medium storing a set of instructions that are executable by one or more processors of a charged particle beam system to cause the charged particle beam system to perform a method comprising:
determining a set of intensity gradients based on electron intensity data received from each of a plurality of electron sensing elements; and
determining, based on the set of intensity gradients, at least one boundary of a beam spot.