CPC H01J 37/244 (2013.01) [G01N 23/2251 (2013.01); H01J 37/28 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24507 (2013.01); H01J 2237/24578 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01)] | 20 Claims |
1. A non-transitory computer-readable medium storing a set of instructions that are executable by one or more processors of a charged particle beam system to cause the charged particle beam system to perform a method comprising:
determining a set of intensity gradients based on electron intensity data received from each of a plurality of electron sensing elements; and
determining, based on the set of intensity gradients, at least one boundary of a beam spot.
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