CPC H01J 35/153 (2019.05) [H05G 1/02 (2013.01); H05G 1/28 (2013.01); H05G 1/52 (2013.01); H01J 2235/08 (2013.01); H04N 5/32 (2013.01)] | 36 Claims |
1. A method, comprising:
directing a first light beam to intersect with a charged particle beam at a first location in a first region to produce a first x-ray beam;
detecting a position on a detector where at least a portion of the first x-ray beam impinges; and
determining a timing synchronization of the charged particle beam relative to the first light beam based on the position.
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