US 11,715,193 B2
Color imaging for CMP monitoring
Dominic J. Benvegnu, La Honda, CA (US); Robert D. Tolles, San Jose, CA (US); Boguslaw A. Swedek, Cupertino, CA (US); and Abraham Ravid, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 15, 2020, as Appl. No. 16/744,058.
Application 16/744,058 is a division of application No. 14/942,777, filed on Nov. 16, 2015, granted, now 10,565,701.
Prior Publication US 2020/0151868 A1, May 14, 2020
Int. Cl. G06T 7/00 (2017.01); H04N 23/10 (2023.01); B24B 37/013 (2012.01); G06F 3/04842 (2022.01); G06F 3/04847 (2022.01); G06F 3/0486 (2013.01); G06T 5/00 (2006.01); G06T 5/50 (2006.01)
CPC G06T 7/0006 (2013.01) [B24B 37/013 (2013.01); G06F 3/0486 (2013.01); G06F 3/04842 (2013.01); G06F 3/04847 (2013.01); G06T 5/002 (2013.01); G06T 5/50 (2013.01); G06T 7/0004 (2013.01); H04N 23/10 (2023.01); G06T 2207/10024 (2013.01); G06T 2207/20024 (2013.01); G06T 2207/20216 (2013.01); G06T 2207/30148 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A computer program product, comprising a non-transitory computer readable medium encoded with instructions to cause one or more processors to:
store data indicating a boundary of an area in a 2-dimensional color space, the 2-dimensional color space having a pair of color channels including a first color channel and a second color channel as axes of the color space;
store an image mask identifying one or more regions on a substrate;
receive color data of a substrate from a camera;
generate a color image of the substrate from the color data;
for each pixel of a plurality of pixels within the regions identified by the image mask of the color image, perform a comparison of a pair of color values for the pair of color channels for the pixel to the boundary of the area in the 2-dimensional color space to determine whether the pair of color values meet thresholds provided by the boundary;
count a number of pixels in the color image that fail to meet the thresholds and to compare the number of pixels to a second threshold;
generate a signal to an operator based on results of the comparison for the plurality of pixels.