CPC G05D 7/0623 (2013.01) [C23C 16/52 (2013.01); G05B 19/042 (2013.01); G05D 7/0652 (2013.01); G05B 2219/25252 (2013.01); G05B 2219/25257 (2013.01)] | 19 Claims |
1. A method comprising:
identifying, by a computing device, a set of time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates;
translating, by the computing device, each time value of the set of time values to a recipe parameter for execution of an operation of a processing recipe; and
causing, by the computing device, the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers;
wherein the causing comprises, for each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time; and
wherein a combination of each first period of time and each second period of time equals a timestep of the operation of the processing recipe.
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