US 11,714,430 B2
Process fluid path switching in recipe operations
Mitesh Sanghvi, Sunnyvale, CA (US); Venkatanarayana Shankaramurthy, San Jose, CA (US); Peter Standish, San Jose, CA (US); Anton Baryshnikov, Campbell, CA (US); Thorsten Kril, Santa Cruz, CA (US); Chahal Neema, Santa Clara, CA (US); Vishal Suresh Jamakhandi, Sunnyvale, CA (US); and Abhijit Ashok Kangude, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 29, 2022, as Appl. No. 17/955,987.
Application 17/955,987 is a continuation of application No. 17/248,106, filed on Jan. 8, 2021, granted, now 11,487,304.
Prior Publication US 2023/0021640 A1, Jan. 26, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G05D 7/06 (2006.01); G05B 19/042 (2006.01); C23C 16/52 (2006.01)
CPC G05D 7/0623 (2013.01) [C23C 16/52 (2013.01); G05B 19/042 (2013.01); G05D 7/0652 (2013.01); G05B 2219/25252 (2013.01); G05B 2219/25257 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method comprising:
identifying, by a computing device, a set of time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates;
translating, by the computing device, each time value of the set of time values to a recipe parameter for execution of an operation of a processing recipe; and
causing, by the computing device, the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers;
wherein the causing comprises, for each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time; and
wherein a combination of each first period of time and each second period of time equals a timestep of the operation of the processing recipe.