CPC G03F 7/70491 (2013.01) [G03F 7/705 (2013.01); G03F 7/70658 (2013.01)] | 20 Claims |
1. A method comprising:
obtaining a machine learning model trained to metrology data comprising measurements of an electrical characteristic from previously processed substrates and process metrology data comprising measurements of at least one parameter related to a process characteristic measured from the previously processed substrates;
obtaining process metrology data related to a substrate comprising the at least one parameter; and
providing the obtained process metrology data to the machine learning model for predicting an electrical characteristic of the substrate; and
dynamically updating the machine learning model based on new process metrology data and/or new metrology data.
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