US 11,714,351 B2
Imprint apparatus and article manufacturing method
Kunihiko Asada, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Dec. 12, 2019, as Appl. No. 16/711,982.
Claims priority of application No. 2018-238651 (JP), filed on Dec. 20, 2018.
Prior Publication US 2020/0201171 A1, Jun. 25, 2020
Int. Cl. G03F 7/00 (2006.01); B29C 33/42 (2006.01)
CPC G03F 7/0002 (2013.01) [B29C 33/424 (2013.01); G03F 7/0022 (2013.01); B29C 2033/426 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An imprint apparatus that brings a pattern region of a mold into contact with an imprint material on a shot region of a substrate, performs alignment between the shot region and the pattern region with each other, and cures the imprint material, thereby forming a pattern constituted by a cured product of the imprint material on the substrate, the apparatus comprising:
a light irradiator configured to irradiate the imprint material with light; and
a controller including (i) a circuit configured to control the light irradiator, (ii) a computer having a memory storing a program that, when executed by the computer, causes the computer to control the light irradiator, or both (i) and (ii), the controller being configured to cause the light irradiator to, before the alignment is ended and in a state in which the imprint material on the shot region and the pattern region are in contact, perform a preliminary exposure of irradiating the imprint material with the light to increase a viscosity of the imprint material,
wherein in the preliminary exposure performed before the alignment is ended and in the state in which the imprint material on the shot region and the pattern region are in contact, the controller is configured to control the light irradiator such that an irradiation integrated amount of the preliminary exposure in a contact beginning region of an irradiation region, where the imprint material and the pattern region begin to contact, and in a final contact region of the irradiation region, where the imprint material and the pattern region finally come into contact, is smaller than an irradiation integrated amount of the preliminary exposure in a certain region of the irradiation region different from the contact beginning region and the final contact region, and
wherein after the preliminary exposure and the alignment between the substrate and the mold is ended, the controller is configured to control the light irradiator to irradiate the imprint material with light of a main exposure to cure the imprint material.