CPC G01J 1/4257 (2013.01) [G01J 1/0252 (2013.01); G01J 1/0425 (2013.01)] | 20 Claims |
1. A device comprising:
a plurality of epitaxial chips, wherein at least one of the plurality of epitaxial chips includes:
a light source;
a detector,
a conductive layer configured as a waveguide for the light source, and
a trench that electrically isolates the light source and the detector, wherein the trench is deeper than the conductive layer.
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