CPC C23C 16/45565 (2013.01) [C23C 16/458 (2013.01); C23C 16/45544 (2013.01); C23C 16/45589 (2013.01); C23C 16/52 (2013.01); H01J 37/3244 (2013.01); H01J 37/32431 (2013.01); H01J 37/32449 (2013.01)] | 18 Claims |
1. A processing method comprising: flowing a fluid through a showerhead of a processing chamber into a process gap between the showerhead and a support surface of a substrate support to create a boundary layer having an undisrupted thickness; and disrupting the thickness of the boundary layer to create a boundary layer with a disrupted thickness by jittering the substrate support parallel to the showerhead while the fluid is flowing, wherein the undisrupted thickness of the boundary layer is in the range of 0.1 to 2 mm, and wherein the disrupted thickness of the boundary layer is greater than or equal to 10% difference relative to the undisrupted thickness.
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