CPC C09G 1/02 (2013.01) [B24B 1/00 (2013.01); B24B 37/044 (2013.01); C09G 1/00 (2013.01); C09G 1/04 (2013.01); C09G 1/06 (2013.01); C09K 3/1454 (2013.01); C09K 3/1463 (2013.01); C09K 13/06 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01); H01L 21/31053 (2013.01); H01L 21/3212 (2013.01); H01L 21/76224 (2013.01)] | 16 Claims |
1. A polishing agent consisting essentially of:
a water-soluble polymer comprising a copolymer of a monomer (A) which comprises at least one selected from the group consisting of an unsaturated dicarboxylic acid, a derivative thereof, and salts of the unsaturated dicarboxylic acid and the derivative thereof and a monomer (B) other than the monomer (A), comprising an ethylenic double bond and no acidic group;
a cerium oxide particle;
a dispersant which is an ammonium acrylate salt;
a pH regulator; and
water,
wherein:
the polishing agent has a pH of 8.0 to 8.6.
|