US 11,712,889 B2
Electrohydrodynamic jet printed photonic devices
Brian Iezzi, Ann Arbor, MI (US); Max Shtein, Ann Arbor, MI (US); Zahra Afkhami Kheirabadi, Ann Arbor, MI (US); and Kira Barton, Ann Arbor, MI (US)
Assigned to The Regents of the University of Michigan, Ann Arbor, MI (US)
Filed by The Regents of the University of Michigan, Ann Arbor, MI (US)
Filed on Aug. 6, 2021, as Appl. No. 17/396,043.
Claims priority of provisional application 63/062,389, filed on Aug. 6, 2020.
Prior Publication US 2022/0040976 A1, Feb. 10, 2022
Int. Cl. B41J 2/06 (2006.01); H01L 33/46 (2010.01); G03F 7/20 (2006.01); B41J 11/00 (2006.01)
CPC B41J 2/06 (2013.01) [B41J 11/00214 (2021.01); G03F 7/2018 (2013.01); H01L 33/46 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of fabricating a thin film structure, the method comprising:
printing, using an electrohydrodynamic jet (e-jet) printing apparatus, a first layer comprising a first liquid ink, such that the first layer is supported by a substrate;
curing the first layer;
printing, using the e-jet printing apparatus, a second layer comprising a second liquid ink, such that the second layer is supported by the first layer; and
curing the second layer.