US 11,712,653 B2
Methods and systems for adsorbing organometallic vapor
Charles H. Applegarth, San Luis Obispo, CA (US); Rocky D. Gipson, San Marcos, CA (US); Sarah Vogt, Grover Beach, CA (US); Joshua T. Cook, San Diego, CA (US); Matthew Browning, San Luis Obispo, CA (US); and Marco Holzner, San Luis Obispo, CA (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on May 20, 2020, as Appl. No. 16/879,514.
Claims priority of provisional application 62/852,506, filed on May 24, 2019.
Prior Publication US 2020/0368669 A1, Nov. 26, 2020
Int. Cl. B01D 53/00 (2006.01); B01D 53/04 (2006.01); B01J 20/28 (2006.01); B01J 20/20 (2006.01); B01J 20/08 (2006.01); B01J 20/10 (2006.01)
CPC B01D 53/0438 (2013.01) [B01J 20/08 (2013.01); B01J 20/103 (2013.01); B01J 20/20 (2013.01); B01J 20/2808 (2013.01); B01J 20/28061 (2013.01); B01J 20/28064 (2013.01); B01J 20/28066 (2013.01); B01D 2253/102 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2253/306 (2013.01); B01D 2253/308 (2013.01); B01D 2257/706 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of removing gaseous organometallic vapor from a gas mixture comprising the organometallic vapor and a non-organometallic vapor, the method comprising:
passing the gas mixture through a first particle filter to substantially remove first particles of a first size;
after passing the gas mixture through the first particle filter, passing the gas mixture through a solid adsorbent;
adsorbing the organometallic vapor onto the solid adsorbent; and
after adsorbing the organometallic vapor onto the solid adsorbent, passing the gas mixture through a second particle filter to substantially remove second particles of a second size less than the first size.