CPC B01D 53/0438 (2013.01) [B01J 20/08 (2013.01); B01J 20/103 (2013.01); B01J 20/20 (2013.01); B01J 20/2808 (2013.01); B01J 20/28061 (2013.01); B01J 20/28064 (2013.01); B01J 20/28066 (2013.01); B01D 2253/102 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2253/306 (2013.01); B01D 2253/308 (2013.01); B01D 2257/706 (2013.01)] | 18 Claims |
1. A method of removing gaseous organometallic vapor from a gas mixture comprising the organometallic vapor and a non-organometallic vapor, the method comprising:
passing the gas mixture through a first particle filter to substantially remove first particles of a first size;
after passing the gas mixture through the first particle filter, passing the gas mixture through a solid adsorbent;
adsorbing the organometallic vapor onto the solid adsorbent; and
after adsorbing the organometallic vapor onto the solid adsorbent, passing the gas mixture through a second particle filter to substantially remove second particles of a second size less than the first size.
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