US 11,711,932 B2
Photoelectric conversion element including first electrode, second electrodes, photoelectric conversion film, and conductive layer and method for manufacturing the same
Masaya Hirade, Osaka (JP); Manabu Nakata, Osaka (JP); Katsuya Nozawa, Osaka (JP); and Yasunori Inoue, Osaka (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed by PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed on May 6, 2021, as Appl. No. 17/313,563.
Application 17/313,563 is a division of application No. 16/274,154, filed on Feb. 12, 2019, granted, now 11,031,568.
Claims priority of application No. 2018-031899 (JP), filed on Feb. 26, 2018.
Prior Publication US 2021/0265583 A1, Aug. 26, 2021
Int. Cl. H01L 51/44 (2006.01); H10K 30/82 (2023.01); H10K 30/30 (2023.01); H10K 39/32 (2023.01); H10K 71/13 (2023.01); H10K 71/16 (2023.01); H10K 71/20 (2023.01)
CPC H10K 30/82 (2023.02) [H10K 30/353 (2023.02); H10K 39/32 (2023.02); H10K 71/135 (2023.02); H10K 71/164 (2023.02); H10K 71/231 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A photoelectric conversion element comprising:
a semiconductor substrate having a principal surface;
second electrodes which are located on or above the principal surface, the second electrodes being one- or two-dimensionally arranged;
a photoelectric conversion film covering at least the second electrodes; and
a conductive layer that includes a covering section covering a portion of the photoelectric conversion film, the portion overlapping the second electrodes in plan view, wherein
in a cross section perpendicular to the principal surface, the conductive layer includes an overhanging portion that overhangs a side end portion of the photoelectric conversion film,
in the cross section, an outwardly facing surface of the photoelectric conversion film below the overhanging portion of the conductive layer includes a tapered portion, the tapered portion being located on an outermost side of the photoelectric conversion film, and
in the cross section, a width of the photoelectric conversion film increases toward the principal surface.