US 11,711,883 B2
Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same
Minseok Choi, Hwaseong-si (KR); Injae Lee, Hwaseong-si (KR); Inho Choi, Seoul (KR); Sungyeol Kim, Yongin-si (KR); Sunghyup Kim, Hwaseong-si (KR); Jeonggil Kim, Hwaseong-si (KR); and Jongbin Park, Gangneung-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Aug. 4, 2021, as Appl. No. 17/393,474.
Claims priority of application No. 10-2020-0166967 (KR), filed on Dec. 2, 2020.
Prior Publication US 2022/0174806 A1, Jun. 2, 2022
Int. Cl. H05G 2/00 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC H05G 2/006 (2013.01) [G03F 7/70033 (2013.01); G03F 7/7055 (2013.01); H05G 2/008 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A droplet accelerating assembly configured to accelerate a droplet ejected by a droplet generator, the droplet accelerating assembly comprising:
an acceleration chamber extending in a first direction parallel to an ejection direction of the droplet, the acceleration chamber including:
a first side connected to the droplet generator,
a second side opposite the first side in the first direction, the second side including a discharge hole, and
a fluid flow path;
a pressure controller connected to the fluid flow path of the acceleration chamber, the pressure controller being configured to adjust an internal pressure of the acceleration chamber;
an electrifier in the acceleration chamber, the electrifier being configured to electrify the droplet ejected by the droplet generator into an electrified droplet; and
an accelerator in the acceleration chamber, the accelerator being configured to accelerate the electrified droplet and including an accelerating electrode having a ring shape extending along an inner surface of the acceleration chamber, the accelerating electrode including an acceleration hole through a center portion thereof, and a width of the acceleration hole being adjustable.