US 11,711,067 B2
Micromachined ultrasound transducer using multiple piezoelectric materials
Stefon Shelton, Oakland, CA (US); Andre Guedes, Lisbon (PT); Richard Przybyla, Emeryville, CA (US); Meng-Hsiung Kiang, Berkeley, CA (US); and David Horsley, Berkeley, CA (US)
Assigned to InvenSense, Inc., San Jose, CA (US)
Filed by InvenSense, Inc., San Jose, CA (US)
Filed on Feb. 18, 2020, as Appl. No. 16/794,099.
Application 16/794,099 is a continuation of application No. 15/342,719, filed on Nov. 3, 2016, granted, now 10,566,949, issued on Feb. 18, 2020.
Application 15/342,719 is a continuation of application No. PCT/US2015/024114, filed on Apr. 2, 2015.
Claims priority of provisional application 61/991,408, filed on May 9, 2014.
Prior Publication US 2020/0266798 A1, Aug. 20, 2020
Int. Cl. H03H 9/17 (2006.01); B06B 1/06 (2006.01); H04R 17/00 (2006.01); H10N 30/853 (2023.01); H10N 30/20 (2023.01); H03H 9/02 (2006.01); H03H 9/15 (2006.01)
CPC H03H 9/174 (2013.01) [B06B 1/0603 (2013.01); H03H 9/02244 (2013.01); H03H 9/178 (2013.01); H04R 17/00 (2013.01); H10N 30/2047 (2023.02); H10N 30/853 (2023.02); H10N 30/8542 (2023.02); H10N 30/8554 (2023.02); H03H 2009/155 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A transducer device comprising:
a substrate with a structural layer for supporting a membrane, the membrane comprising:
first and second piezoelectric layers made of corresponding different first and second piezoelectric materials, wherein one of the first and second piezoelectric material is optimized for transmitter mode operation and another of the first and second piezoelectric materials is optimized for receiver mode operation; and
three or more electrodes, implemented in two or more conductive electrode layers, wherein the first piezoelectric layer is formed directly on the structural layer over an opening in the substrate, wherein the first piezoelectric layer is sandwiched between a first pair of electrodes of the three or more electrodes and wherein the second piezoelectric layer is sandwiched between a second pair of electrodes of the three or more electrodes, wherein the first and second pairs of electrodes contain no more than one electrode of the three or more electrodes that is common to both the first pair and the second pair, wherein at least two electrodes are in a same conductive electrode layer.