US 11,710,630 B2
Plasma block with integrated cooling
Tanmay P. Gurjar, Santa Clara, CA (US); Sumit S. Patankar, Santa Clara, CA (US); and Sudhir R. Gondhalekar, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 23, 2020, as Appl. No. 16/856,282.
Prior Publication US 2021/0335603 A1, Oct. 28, 2021
Int. Cl. H01L 21/02 (2006.01); H01J 37/305 (2006.01); C23F 1/08 (2006.01); C23C 14/56 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/02252 (2013.01) [C23C 14/56 (2013.01); C23F 1/08 (2013.01); H01J 37/3053 (2013.01); H01J 37/32357 (2013.01); H01J 37/32522 (2013.01); H01J 2237/0437 (2013.01)] 20 Claims
OG exemplary drawing
 
12. A remote plasma source comprising:
a monolithic first plasma block segment defining an inlet to an internal channel of the first plasma block segment, wherein the first plasma block segment further defines a cooling channel between the internal channel of the first plasma block segment and a first exterior surface of the first plasma block segment; and
a monolithic second plasma block segment defining an outlet from an internal channel of the second plasma block segment, wherein the second plasma block segment further defines a cooling channel between the internal channel of the second plasma block segment and a first exterior surface of the second plasma block segment.