CPC H01L 21/02252 (2013.01) [C23C 14/56 (2013.01); C23F 1/08 (2013.01); H01J 37/3053 (2013.01); H01J 37/32357 (2013.01); H01J 37/32522 (2013.01); H01J 2237/0437 (2013.01)] | 20 Claims |
12. A remote plasma source comprising:
a monolithic first plasma block segment defining an inlet to an internal channel of the first plasma block segment, wherein the first plasma block segment further defines a cooling channel between the internal channel of the first plasma block segment and a first exterior surface of the first plasma block segment; and
a monolithic second plasma block segment defining an outlet from an internal channel of the second plasma block segment, wherein the second plasma block segment further defines a cooling channel between the internal channel of the second plasma block segment and a first exterior surface of the second plasma block segment.
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