CPC G02F 1/0147 (2013.01) [G02F 1/011 (2013.01); G02F 2203/50 (2013.01)] | 18 Claims |
1. An array of phase shifters comprising:
a plurality of phase shifters arranged in rows and columns, each phase shifter comprising:
a substrate;
a cladding layer over the substrate;
a waveguide within the cladding layer comprising a plurality of parallel waveguide sections adjacent each other, a plurality of waveguide bend sections connecting the plurality of parallel waveguide sections, and escape waveguides; and
a heater for heating the waveguide, thereby changing an index of refraction thereof;
wherein each escape waveguide is routed between neighboring phase shifters, such that the escape waveguide is disposed closer to each said neighboring phase shifter than a spacing between said neighboring phase shifters.
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