US 11,709,180 B2
Atomic force microscope using artificial intelligence object recognition technology and operation method thereof
Man Hee Lee, Cheongju-si Chungcheongbuk-do (KR); and Jun Hong Park, Asan-si Chungcheongnam-do (KR)
Assigned to CHUNGBUK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, Cheongju-si (KR)
Appl. No. 17/772,267
Filed by CHUNGBUK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, Cheongju-si (KR)
PCT Filed May 11, 2021, PCT No. PCT/KR2021/005882
§ 371(c)(1), (2) Date Apr. 27, 2022,
PCT Pub. No. WO2022/014838, PCT Pub. Date Jan. 20, 2022.
Claims priority of application No. 10-2020-0087092 (KR), filed on Jul. 14, 2020; and application No. 10-2020-0112538 (KR), filed on Sep. 3, 2020.
Prior Publication US 2022/0373575 A1, Nov. 24, 2022
Int. Cl. G01Q 20/02 (2010.01); G01Q 10/04 (2010.01); G06T 7/70 (2017.01)
CPC G01Q 20/02 (2013.01) [G01Q 10/04 (2013.01); G06T 7/70 (2017.01); G06T 2207/20081 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An atomic force microscope comprising:
a sample stage configured to allow a sample to be placed thereon;
a cantilever disposed above the sample, the cantilever including a probe tip;
a laser configured to radiate a laser beam to the cantilever;
a photodetector configured to receive a laser beam reflected from the cantilever;
a first camera configured to photograph the sample and the cantilever;
a second camera configured to photograph the cantilever and a spot of a laser beam radiated from the laser; and
a processor electrically connected to the first camera, the second camera, and the photodetector, the processor processing data acquired by the first camera, the second camera, and the photodetector.