US 11,709,132 B2
Modulus-enforced probe
Michael Tanksalvala, Longmont, CO (US); Daniel E. Adams, Thornton, CO (US); Dennis Gardner, Alexandria, VA (US); Christina L. Porter, Superior, CO (US); Giulia F. Mancini, Boulder, CO (US); Margaret M. Murnane, Boulder, CO (US); and Henry C. Kapteyn, Boulder, CO (US)
Assigned to Regents of the University of Colorado, a body corporate, Denver, CO (US)
Appl. No. 16/302,911
Filed by The Regents of the University of Colorado, a body corporate, Denver, CO (US)
PCT Filed May 18, 2017, PCT No. PCT/US2017/033397
§ 371(c)(1), (2) Date Nov. 19, 2018,
PCT Pub. No. WO2017/201327, PCT Pub. Date Nov. 23, 2017.
Claims priority of provisional application 62/338,961, filed on May 19, 2016.
Prior Publication US 2019/0204218 A1, Jul. 4, 2019
Int. Cl. G01N 21/47 (2006.01); G01N 21/956 (2006.01); G01N 21/45 (2006.01); G01N 21/33 (2006.01); G01N 21/17 (2006.01)
CPC G01N 21/4788 (2013.01) [G01N 21/33 (2013.01); G01N 21/45 (2013.01); G01N 21/4795 (2013.01); G01N 21/956 (2013.01); G01N 2021/1782 (2013.01); G01N 2021/335 (2013.01); G01N 2021/4711 (2013.01); G01N 2201/061 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method of determining spatially-resolved, complex scattering properties of a sample, comprising the steps of:
a. providing at least partially spatially-coherent radiation in the form of an incident beam;
b. delivering the incident beam onto the sample to produce scattered radiation;
c. collecting and recording the scattered radiation with an array detector, forming a standard dataset;
d. collecting and recording relatively unscattered radiation on the array detector, forming a MEP dataset;
e. using the standard dataset and the MEP dataset to calculate complex scattering properties of the sample via a phase retrieval method by constraining an illumination profile using the MEP dataset.