CPC G01N 21/4788 (2013.01) [G01N 21/33 (2013.01); G01N 21/45 (2013.01); G01N 21/4795 (2013.01); G01N 21/956 (2013.01); G01N 2021/1782 (2013.01); G01N 2021/335 (2013.01); G01N 2021/4711 (2013.01); G01N 2201/061 (2013.01)] | 17 Claims |
1. A method of determining spatially-resolved, complex scattering properties of a sample, comprising the steps of:
a. providing at least partially spatially-coherent radiation in the form of an incident beam;
b. delivering the incident beam onto the sample to produce scattered radiation;
c. collecting and recording the scattered radiation with an array detector, forming a standard dataset;
d. collecting and recording relatively unscattered radiation on the array detector, forming a MEP dataset;
e. using the standard dataset and the MEP dataset to calculate complex scattering properties of the sample via a phase retrieval method by constraining an illumination profile using the MEP dataset.
|