CPC C23C 16/305 (2013.01) [B22F 7/008 (2013.01); C23C 16/448 (2013.01); C23C 16/45502 (2013.01); C23C 16/45514 (2013.01); C23C 16/46 (2013.01); H01L 21/02568 (2013.01); H01L 21/02581 (2013.01); H01L 21/28568 (2013.01); H01L 31/0324 (2013.01); B22F 2207/01 (2013.01); B22F 2302/45 (2013.01)] | 5 Claims |
1. A metal chalcogenide thin film comprising:
a transition metal element; and
a chalcogen element, wherein at least one of the transition metal element and the chalcogen element has a composition gradient along a surface of the metal chalcogenide thin film, the composition gradient being an in-plane composition gradient, a thickness of the metal chalcogenide thin film continuously decreases with the composition gradient.
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