US D992,845 S
Roller shaft for substrate cleaning
Tomoaki Fujimoto, Tokyo (JP); Mitsuru Miyazaki, Tokyo (JP); and Takuya Inoue, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Nov. 13, 2020, as Appl. No. 29/758,287.
Claims priority of application No. 2020-009569 D (JP), filed on May 15, 2020.
Term of patent 15 Years
LOC (14) Cl. 15 - 05
U.S. Cl. D32—25
OG exemplary drawing
 
The ornamental design for a roller shaft for substrate cleaning, as shown and described.