CPC H10N 30/883 (2023.02) [H03H 9/1071 (2013.01); H10N 30/00 (2023.02)] | 11 Claims |
1. An electronic device comprising:
a support substrate;
a piezoelectric layer that is provided on the support substrate;
a functional element including an electrode provided on a surface of the piezoelectric layer;
a metallic frame body that is provided on the support substrate so as to surround the piezoelectric layer and the functional element in a plan view;
a metallic lid that is provided on the frame body so as to form a space between the lid and the support substrate, and seals the functional element into the space; and
a columnar body that is provided between the support substrate and the lid in the space,
wherein one of end surfaces of the columnar body is in contact with the lid.
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