US 11,706,991 B2
Electronic device
Ryouta Iwabuchi, Tokyo (JP); Motoi Yamauchi, Tokyo (JP); Takashi Miyagawa, Tokyo (JP); Tsutomu Kikuchi, Tokyo (JP); and Yuki Maruya, Tokyo (JP)
Assigned to TAIYO YUDEN CO., LTD., Tokyo (JP)
Filed by TAIYO YUDEN CO., LTD., Tokyo (JP)
Filed on Sep. 11, 2020, as Appl. No. 17/18,903.
Claims priority of application No. JP2019-175663 (JP), filed on Sep. 26, 2019.
Prior Publication US 2021/0098683 A1, Apr. 1, 2021
Int. Cl. H10N 30/00 (2023.01); H10N 30/88 (2023.01); H03H 9/10 (2006.01)
CPC H10N 30/883 (2023.02) [H03H 9/1071 (2013.01); H10N 30/00 (2023.02)] 11 Claims
OG exemplary drawing
 
1. An electronic device comprising:
a support substrate;
a piezoelectric layer that is provided on the support substrate;
a functional element including an electrode provided on a surface of the piezoelectric layer;
a metallic frame body that is provided on the support substrate so as to surround the piezoelectric layer and the functional element in a plan view;
a metallic lid that is provided on the frame body so as to form a space between the lid and the support substrate, and seals the functional element into the space; and
a columnar body that is provided between the support substrate and the lid in the space,
wherein one of end surfaces of the columnar body is in contact with the lid.