CPC H10N 30/302 (2023.02) [G01L 25/00 (2013.01); G01N 29/30 (2013.01); G01R 35/005 (2013.01)] | 9 Claims |
1. A method for calibrating at least one sensors, wherein the sensor includes only one piezoelectric element with at least one electrode, and wherein at least one electrode is embodied as a measurement electrode, wherein the method comprises:
applying an electrical excitation voltage to at least one further electrode of the only one piezoelectric element embodied as a calibration electrode, generating a mechanical deformation of the piezoelectric element,
capturing a voltage induced by the deformation of the piezoelectric element with at least one measurement electrode,
comparing the applied electrical excitation voltage and the captured voltage,
calculating an electrical field formed between the calibration electrode and the measurement electrode, and
the calculation of the electrical field is included in in calculating a calibration factor.
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