US 11,706,988 B2
Piezoelectric device and method of manufacturing the same
Shinsuke Ikeuchi, Nagaokakyo (JP); Tetsuya Kimura, Nagaokakyo (JP); Katsumi Fujimoto, Nagaokakyo (JP); Yutaka Kishimoto, Nagaokakyo (JP); and Fumiya Kurokawa, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jan. 31, 2020, as Appl. No. 16/777,926.
Application 16/777,926 is a continuation of application No. PCT/JP2018/042571, filed on Nov. 16, 2018.
Claims priority of application No. 2017-224671 (JP), filed on Nov. 22, 2017.
Prior Publication US 2020/0168787 A1, May 28, 2020
Int. Cl. H01L 41/09 (2006.01); H10N 30/20 (2023.01); H10N 30/045 (2023.01); H10N 30/50 (2023.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01); H10N 30/00 (2023.01)
CPC H10N 30/20 (2023.02) [H10N 30/045 (2023.02); H10N 30/1051 (2023.02); H10N 30/50 (2023.02); H10N 30/871 (2023.02); H10N 30/883 (2023.02)] 11 Claims
OG exemplary drawing
 
1. A piezoelectric device comprising:
a piezoelectric single crystal body that has a homogeneous polarization state and of which at least a portion is configured to flexurally vibrate;
an upper electrode disposed on an upper surface of the piezoelectric single crystal body;
a lower electrode disposed on a lower surface of the piezoelectric single crystal body; and
a supporting substrate disposed below the piezoelectric single crystal body; wherein
a recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body; and
a space at a side of the piezoelectric single crystal body is exposed to the recess.