CPC H10N 30/20 (2023.02) [H10N 30/045 (2023.02); H10N 30/1051 (2023.02); H10N 30/50 (2023.02); H10N 30/871 (2023.02); H10N 30/883 (2023.02)] | 11 Claims |
1. A piezoelectric device comprising:
a piezoelectric single crystal body that has a homogeneous polarization state and of which at least a portion is configured to flexurally vibrate;
an upper electrode disposed on an upper surface of the piezoelectric single crystal body;
a lower electrode disposed on a lower surface of the piezoelectric single crystal body; and
a supporting substrate disposed below the piezoelectric single crystal body; wherein
a recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body; and
a space at a side of the piezoelectric single crystal body is exposed to the recess.
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