US 11,705,689 B2
Gallium and nitrogen bearing dies with improved usage of substrate material
Alexander Sztein, Santa Barbara, CA (US); Melvin McLaurin, Santa Barbara, CA (US); Po Shan Hsu, Arcadia, CA (US); and James W. Raring, Santa Barbara, CA (US)
Assigned to KYOCERA SLD Laser, Inc., Goleta, CA (US)
Filed by KYOCERA SLD Laser, Inc., Goleta, CA (US)
Filed on Jul. 16, 2021, as Appl. No. 17/377,835.
Application 17/377,835 is a continuation of application No. 16/876,569, filed on May 18, 2020, granted, now 11,088,505.
Application 16/876,569 is a continuation of application No. 16/199,974, filed on Nov. 26, 2018, granted, now 10,658,810, issued on May 19, 2020.
Application 16/199,974 is a continuation of application No. 15/675,532, filed on Aug. 11, 2017, granted, now 10,141,714, issued on Nov. 27, 2018.
Application 15/675,532 is a continuation of application No. 15/173,441, filed on Jun. 3, 2016, granted, now 9,755,398, issued on Sep. 5, 2017.
Application 15/173,441 is a continuation of application No. 14/176,403, filed on Feb. 10, 2014, granted, now 9,362,715, issued on Jun. 7, 2016.
Prior Publication US 2022/0006256 A1, Jan. 6, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01S 5/32 (2006.01); H01S 5/02 (2006.01); H01S 5/343 (2006.01); H01S 5/0234 (2021.01)
CPC H01S 5/0203 (2013.01) [H01S 5/0202 (2013.01); H01S 5/0205 (2013.01); H01S 5/0215 (2013.01); H01S 5/0217 (2013.01); H01S 5/0234 (2021.01); H01S 5/3202 (2013.01); H01S 5/320275 (2019.08); H01S 5/34333 (2013.01); H01S 5/34346 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A plurality of dies on a gallium and nitrogen containing substrate having a surface region, each of the plurality of dies comprising:
an epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active region;
a release region comprised of a material with a smaller bandgap than the epitaxial material, wherein a lateral width of the release region is narrower than a lateral width of immediately adjacent layers above and below the release region to form undercut regions bounding each side of the release region; and
a passivation region extending along sidewalls of the active region.
 
12. A plurality of dies on a gallium and nitrogen containing substrate having a surface region oriented along a polar, non-polar, or semi-polar plane, each of the plurality of dies comprising:
an epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active region;
a release region comprised of InGaN, InN, InAlN, or InAlGaN, wherein a lateral width of the release region is narrower than a lateral width of immediately adjacent layers above and below the release region to form undercut regions bounding each side of the release region; and
a passivation region extending along sidewalls of the active region.