US 11,705,469 B2
Germanium based focal plane array for the short infrared spectral regime
Avraham Bakal, Tel-Aviv (IL); Uriel Levy, Kiryat Ono (IL); and Omer Kapach, Jerusalem (IL)
Assigned to TriEye Ltd., Tel Aviv (IL)
Filed by TriEye Ltd., Tel Aviv (IL)
Filed on Jun. 26, 2021, as Appl. No. 17/359,527.
Application 17/359,527 is a continuation of application No. 16/470,252, granted, now 11,063,079, previously published as PCT/IB2019/050030, filed on Jan. 2, 2019.
Claims priority of provisional application 62/615,198, filed on Jan. 9, 2018.
Prior Publication US 2021/0327942 A1, Oct. 21, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 27/146 (2006.01); H01L 31/0232 (2014.01); H01L 31/028 (2006.01); H01L 31/18 (2006.01)
CPC H01L 27/14627 (2013.01) [H01L 27/14643 (2013.01); H01L 31/028 (2013.01); H01L 31/02327 (2013.01); H01L 31/1804 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A light detecting structure comprising:
a) a silicon (Si) base having a pyramidal shape with a wide incoming light-facing pyramid bottom and a narrower truncated pyramid top; and
b) a germanium (Ge) photodiode formed on the narrower truncated pyramid top, wherein the Ge photodiode is operable to detect light in the short wavelength infrared (SWIR) range, wherein the Ge photodiode has a height smaller than a height of the Si base.