US 11,705,345 B2
Semiconductor system with steam generator and reactor
Imad Mahawili, Roseville, CA (US)
Assigned to EDWARDS VACUUM LLC, Sanborn, NY (US)
Filed by Edwards Vacuum LLC, Sanborn, NY (US)
Filed on Apr. 30, 2020, as Appl. No. 16/862,898.
Prior Publication US 2021/0343551 A1, Nov. 4, 2021
Int. Cl. B01D 53/86 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67017 (2013.01) [H01L 21/67161 (2013.01); H01L 21/67248 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A semiconductor processing system comprising:
a semiconductor processing chamber;
an exhaust line in fluid communication with the semiconductor processing chamber; and
a steam generator and reactor having a process conduit with an inlet and an outlet, said outlet in fluid communication with the exhaust line, said steam generator and reactor generating heat and directing the heat to the process conduit along a length of said process conduit between said inlet and said outlet of said process conduit and configured to heat the process conduit for generating superheated steam in the process conduit, and the process conduit generating superheated steam in the exhaust fluid flowing in the exhaust line to effect both physical and chemical transformations of chemicals in the exhaust fluid flowing in the exhaust line,
wherein the inlet comprises a second inlet, and the steam generator and reactor having a first inlet in fluid communication with the process conduit and a supply of water, the steam generator and reactor configured to generate the superheated steam from the water flowing into the process conduit from the first inlet, and the second inlet in fluid communication with said process conduit downstream of the first inlet wherein the exhaust fluid is injected into the superheated steam.