US 11,705,333 B2
Structures including multiple carbon layers and methods of forming and using same
Yoshio Susa, Tama (JP); Ryo Miyama, Tokyo (JP); and Yoshiyuki Kikuchi, Tokyo (JP)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 18, 2021, as Appl. No. 17/323,321.
Claims priority of provisional application 63/028,366, filed on May 21, 2020.
Prior Publication US 2021/0366712 A1, Nov. 25, 2021
Int. Cl. H01L 21/033 (2006.01); H01J 37/32 (2006.01); C23C 16/56 (2006.01); C23C 16/26 (2006.01); H01L 21/311 (2006.01); H01L 21/3105 (2006.01)
CPC H01L 21/0337 (2013.01) [C23C 16/26 (2013.01); C23C 16/56 (2013.01); H01J 37/32449 (2013.01); H01J 37/32834 (2013.01); H01L 21/0332 (2013.01); H01J 2237/332 (2013.01); H01L 21/31053 (2013.01); H01L 21/31122 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method of forming a structure, the method comprising the steps of:
providing a substrate within a reaction chamber, the substrate comprising one or more recesses formed on a surface of the substrate;
forming a first carbon layer overlying the surface; and
forming a second carbon layer overlying the first carbon layer,
wherein the first carbon layer is formed by forming initially flowable material,
wherein the first carbon layer fills the one or more recesses to a height above the surface of the substrate, and
wherein a density of the first carbon layer is higher than a density of the second carbon layer.