CPC G06V 40/1306 (2022.01) [G06F 3/0433 (2013.01); G06F 3/0445 (2019.05); G06F 3/0446 (2019.05); G06F 2203/04103 (2013.01)] | 18 Claims |
1. An ultrasonic fingerprint sensor apparatus, comprising:
a base substrate;
a first electrode layer on the base substrate, and comprising an array of a plurality of first electrodes spaced apart from each other by an inter-electrode region;
a piezoelectric layer on a side of the first electrode layer away from the base substrate;
a second electrode layer on a side of the piezoelectric layer away from the base substrate, and comprising one or more second electrodes; and
a first reference electrode layer configured to provide a first reference voltage; and
an insulating barrier layer on a side of the piezoelectric layer away from the base substrate;
wherein an orthographic projection of the first electrode layer on the base substrate is substantially non-overlapping with an orthographic projection of the second electrode layer on the base substrate;
the first electrode layer and the first reference electrode layer are between the base substrate and the piezoelectric layer;
the insulating barrier layer comprises a plurality of barrier blocks;
an orthographic projection of a respective one of the plurality of barrier blocks on the base substrate is substantially non-overlapping with the orthographic projection of the second electrode layer on the base substrate; and
an orthographic projection of a respective one of the plurality of barrier blocks on the base substrate at least partially overlaps with an orthographic projection of a respective one of the plurality of first electrodes on the base substrate.
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