CPC G03F 9/7069 (2013.01) [G01B 11/272 (2013.01); G03F 7/70633 (2013.01)] | 20 Claims |
1. A computer program product comprising a non-transitory computer readable medium having instructions therein, the instructions, when executed by a computer system, configured to cause the computer system to at least:
obtain metrology data using each of a plurality of substrate measurement recipes;
determine a parameter for each of the plurality of substrate measurement recipes from the metrology data, wherein the parameter characterizes dependence of the metrology data on an angular distribution of incident electromagnetic radiation used in the substrate measurement recipe;
select at least one substrate measurement recipe from the plurality based on the parameters; and
configure a measurement apparatus or process based on the selected at least one substrate measurement recipe and/or provide a signal representing, or based on, the selected at least one substrate measurement recipe to a tool or system for use by the tool or system in controlling or configuring a measurement process.
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