CPC G03F 7/0002 (2013.01) [G02B 5/1852 (2013.01); G02B 5/1861 (2013.01); G02B 27/0012 (2013.01); G02B 27/32 (2013.01); G03F 9/7042 (2013.01); G06T 7/0006 (2013.01); G06T 7/73 (2017.01); G06V 10/44 (2022.01); G06T 2207/30204 (2013.01)] | 8 Claims |
1. A method of marking a target substrate with a target fiducial marker having a target fiducial design, the method comprising:
forming a master mold having a master surface relief pattern layer including the target fiducial design;
transferring a negative of the target fiducial design to a first mold by pressing together the master mold and the first mold;
separating the master mold and the first mold, the negative of the target fiducial design transferred to the first mold in a first surface relief pattern layer on the first mold;
depositing hardenable material onto the target substrate;
transferring the target fiducial design to the target substrate by pressing together the first mold and the target substrate; and
separating the first mold and the target substrate, the target fiducial design transferred to the target substrate in a target surface relief pattern layer in the hardenable material deposited onto the target substrate, the target surface relief pattern layer marking the target substrate with the target fiducial marker having the target fiducial design.
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