US 11,703,731 B2
Electro-optical device and electronic apparatus
Tomoki Yokota, Suwa (JP); and Kikuya Morita, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Mar. 11, 2022, as Appl. No. 17/692,206.
Claims priority of application No. 2021-039995 (JP), filed on Mar. 12, 2021.
Prior Publication US 2022/0291557 A1, Sep. 15, 2022
Int. Cl. G02F 1/1362 (2006.01); G02F 1/1368 (2006.01)
CPC G02F 1/136213 (2013.01) [G02F 1/1368 (2013.01); G02F 1/136286 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An electro-optical device comprising:
a substrate body provided with a groove;
an insulating film layered on the substrate body in a region including the groove; and
a layered film layered on the insulating film, wherein
the layered film is provided along a side surface and a bottom surface of the groove with the insulating film disposed therebetween,
an opening width of the groove is from 0.6 μm to 1.0 μm, and
a thickness of the insulating film is from 0.05 μm to 0.3 μm.