US 11,703,641 B2
Wavelength division multiplexing filters including a subwavelength grating
Yusheng Bian, Ballston Lake, NY (US); and Francis Afzal, Nashville, TN (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GLOBALFOUNDRIES U.S. Inc., Malta, NY (US)
Filed on Oct. 26, 2021, as Appl. No. 17/510,910.
Prior Publication US 2023/0128725 A1, Apr. 27, 2023
Int. Cl. G02B 6/12 (2006.01); G02B 6/122 (2006.01); G02B 6/13 (2006.01); G02B 6/293 (2006.01)
CPC G02B 6/12007 (2013.01) [G02B 6/1228 (2013.01); G02B 6/13 (2013.01); G02B 6/2938 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure for a wavelength division multiplexing filter, the structure comprising:
a first waveguide core including a first section, a second section, and a first longitudinal axis, the first section and the second section each having a first notched sidewall and a second notched sidewall opposite to the first notched sidewall, the first section of the first waveguide core including a first taper and a first plurality of projections that project outwardly from the first taper transverse to the first longitudinal axis, and the second section of the first waveguide core including a second taper and a second plurality of projections that project outwardly from the second taper transverse to the first longitudinal axis; and
a second waveguide core positioned with a first offset in a first direction relative to the first section and the second section of the first waveguide core and with a second offset in a second direction relative to the first section and the second section of the first waveguide core, the second direction transverse to the first direction.