US 11,703,634 B2
Mounted hollow-core fiber arrangement
Sebastian Thomas Bauerschmidt, Wendelstein (DE); Patrick Sebastian Uebel, Marloffstein (DE); and Peter Maximilian Götz, Bavaria (DE)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Jun. 9, 2022, as Appl. No. 17/836,537.
Application 17/836,537 is a continuation of application No. 16/903,530, filed on Jun. 17, 2020, granted, now 11,385,402.
Claims priority of application No. 19181578 (EP), filed on Jun. 21, 2019; and application No. 19186702 (EP), filed on Jul. 17, 2019.
Prior Publication US 2022/0317368 A1, Oct. 6, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G02B 6/02 (2006.01); G03F 7/20 (2006.01); G01B 11/25 (2006.01); G03F 7/00 (2006.01)
CPC G02B 6/02328 (2013.01) [G02B 6/02366 (2013.01); G03F 7/70008 (2013.01); G01B 11/25 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An arrangement comprising:
a mount arrangement comprising a plurality of mounting contacts configured to apply a force at a plurality of contact points to an outer layer of a hollow-core fiber when supported by the mounting contacts;
a detector configured to measure radiation output by the hollow-core fiber for determining stress-induced loss or mode scrambling; and
a control system configured to adjust, based on the measured radiation, the force applied by the plurality of mounting contacts so that stress-induced loss or mode scrambling inside the hollow-core fiber is reduced.