US 11,703,468 B2
Method and system for determining sample composition from spectral data
Oleksii Kaplenko, Brno (CZ); Jan Klusácek, Brno (CZ); Tomás Tůma, Brno (CZ); Mykola Kaplenko, Brno (CZ); and Ondrej Machek, Brno (CZ)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jul. 1, 2021, as Appl. No. 17/365,832.
Prior Publication US 2023/0003675 A1, Jan. 5, 2023
Int. Cl. G01N 23/2252 (2018.01); G01N 23/20 (2018.01); G01N 23/203 (2006.01); G01N 23/04 (2018.01); G06N 3/02 (2006.01); G01N 23/083 (2018.01); H01J 37/28 (2006.01)
CPC G01N 23/2252 (2013.01) [G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/203 (2013.01); G01N 23/20083 (2013.01); G06N 3/02 (2013.01); G01N 2223/072 (2013.01); H01J 37/28 (2013.01); H01J 2237/2807 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A method, comprising:
irradiating a first sample with a charged particle beam;
detecting a first type emission from the first sample and forming one or more first spectra from the detected first type emission;
identifying one or more first chemical elements within the first sample by processing the first spectra with a trained neural network;
detecting a second type emission from the first sample and displaying a sample image generated based on the detected second type emission;
selecting one or more pixels in the sample image;
displaying one or more chemical elements corresponding to the selected pixels;
responsive to the displayed chemical elements different from a known elemental composition, retraining the trained neural network with spectra corresponding to the selected pixels and the known elemental composition;
irradiating one or more locations of a second sample with the charged particle beam;
acquiring one or more second spectra by detecting the first type emission from the second sample; and
identifying one or more second chemical elements within the second sample by processing the second spectra with the retrained neural network.