CPC G01N 23/201 (2013.01) [G01N 23/207 (2013.01); G01N 23/223 (2013.01); G01T 1/166 (2013.01); G01N 2223/6116 (2013.01)] | 19 Claims |
1. A method for evaluating an array of high aspect ratio (HAR) structures on a sample, the method comprises:
illuminating the sample with an x-ray beam along a first axis parallel to within two degrees to the HAR structures in the array;
sensing a first pattern of small angle x-ray scattering (SAXS) scattered from the sample while illuminating the sample along the first axis;
illuminating the sample with the x-ray beam along a second axis that is oblique to the HAR structures in the array;
sensing a second pattern of the SAXS scattered from the sample while illuminating the sample along the second axis; and
extracting information with respect to the HAR structures based on the first and second patterns by removing from the first pattern of the SAXS a contribution of one or more additional repetitive structures on the substrate having an aspect ratio smaller than the HAR structures, responsively to a sensitivity of the second pattern to rotation of the second axis.
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