US 11,703,040 B2
Pump and cooling substrate
Takafumi Moriasa, Nagaokakyo (JP); Shuichi Kawata, Nagaokakyo (JP); Masahiko Shigaki, Nagaokakyo (JP); and Yuichi Kusano, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 1, 2021, as Appl. No. 17/187,921.
Application 17/187,921 is a continuation of application No. PCT/JP2019/038613, filed on Sep. 30, 2019.
Claims priority of application No. 2018-188012 (JP), filed on Oct. 3, 2018.
Prior Publication US 2021/0180882 A1, Jun. 17, 2021
Int. Cl. F28F 3/12 (2006.01); H01L 23/473 (2006.01); F04B 19/00 (2006.01); F28F 9/22 (2006.01)
CPC F04B 19/006 (2013.01) [H01L 23/473 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A pump comprising:
a pump flow path through which a fluid flows; and
a plurality of electrodes and a plurality of dielectric members disposed in the pump flow path so as to allow a fluid to pass through the plurality of electrodes and the plurality of dielectric members in a flowing direction of the fluid; wherein
each of the plurality of electrodes and each of the plurality of dielectric layers includes two main surfaces opposing each other in the flowing direction;
the plurality of electrodes and the plurality of dielectric members are alternately stacked on each other with the main surfaces of the plurality of electrodes and the main surfaces of the plurality of dielectric layers in contact with each other in the flowing direction so that, among the plurality of dielectric members, a dielectric member is located between adjacent electrodes of the plurality of electrodes in the flowing direction;
among the plurality of electrodes, an inter-electrode polarity of each pair of electrodes is different from an inter-electrode polarity of an adjacent pair of electrodes;
the plurality of dielectric members include:
a first dielectric member disposed at a position of an odd-numbered dielectric member counted from a most upstream side of the flowing direction; and
a second dielectric member disposed at a position of an even-numbered dielectric member counted from the most upstream side of the flowing direction;
a material from which the first dielectric member is made and a material from which the second dielectric member is made are materials that provide a sign of a zeta potential of the first dielectric member in the flowing direction and a sign of a zeta potential of the second dielectric member in the flowing direction that are opposite to each other.