US 11,702,745 B2
Nozzle and nozzle head
Pekka Soininen, Espoo (FI); and Mika Jauhiainen, Espoo (FI)
Assigned to BENEQ OY, Espoo (FI)
Appl. No. 16/755,712
Filed by Beneq Oy, Espoo (FI)
PCT Filed Oct. 17, 2018, PCT No. PCT/FI2018/050756
§ 371(c)(1), (2) Date Apr. 13, 2020,
PCT Pub. No. WO2019/077205, PCT Pub. Date Apr. 25, 2019.
Claims priority of application No. 20175919 (FI), filed on Oct. 18, 2017.
Prior Publication US 2020/0385863 A1, Dec. 10, 2020
Int. Cl. C23C 16/455 (2006.01); C23C 16/54 (2006.01)
CPC C23C 16/45578 (2013.01) [C23C 16/45551 (2013.01); C23C 16/45574 (2013.01); C23C 16/545 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A nozzle head for use in atomic layer deposition for subjecting a surface of a substrate to successive surface reactions of at least two precursors, the nozzle head comprising:
an output surface via which at least one precursor is supplied towards the surface of the substrate;
two or more nozzles for supplying the at least one precursor, wherein each of the two or more nozzles comprising a nozzle output surface via which the at least one precursor is supplied towards the surface of the substrate, a nozzle top surface opposite the nozzle output surface and a pair of opposed first and second nozzle side walls extending between the nozzle output surface and the nozzle top surface, each of the first and second nozzle side walls including an outer side surface of the nozzle, the two or more nozzles are provided adjacent to each other at the output surface, such that the outer side surfaces of the first and second nozzle side walls of the two or more nozzles are towards each other,
wherein the outer side surfaces of the first and second nozzle side walls of the adjacent nozzles of the two or more nozzles are arranged at an expansion distance (G) from each other in a direction of the output surface, and the first nozzle side wall comprises at least one recess having a depth (T) from the outer side surface of the first nozzle side wall and extending between the nozzle top surface and the nozzle output surface for providing a gas passage from the nozzle top surface to the nozzle output surface when the first and second nozzle side walls of the adjacent nozzles are against each other, wherein the at least one recess includes first and second recess side walls extending between the nozzle top surface and the nozzle output surface and defining the depth (T) of the at least one recess from the outer side surface of the first nozzle side wall in a direction towards the second nozzle side wall, wherein the at least one recess extends between the nozzle top surface and the nozzle output surface such that the at least one recess is open towards the nozzle top surface, the nozzle output surface, and a side wall of the adjacent nozzle; and
a body defining a nozzle head chamber inside the body,
wherein the nozzle head chamber is in fluid communication with the two or more nozzles, and the two or more nozzles are arranged to form at least part of a bottom wall of the nozzle head chamber,
wherein the nozzle head chamber comprises a gas inlet configured to supply the at least one precursor into the nozzle head chamber for supplying the at least one precursor via the at least one recess through the output surface towards the surface of the substrate.