US 11,702,735 B2
Use of a carbonaceous coating for protecting a passive electric component from attack by ammonia and system comprising a passive electrical component, which is protected against attack by ammonia
Dirk Salz, Bremen (DE); Andreas Stake, Bremen (DE); Malte Burchardt, Bremen (DE); Franz-Josef Wöstmann, Munster (DE); Stefan Dieckhoff, Lilienthal (DE); Christoph Regula, Bremen (DE); Christopher Dölle, Delmenhorst (DE); and Ralph Wilken, Rastede (DE)
Assigned to Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE)
Appl. No. 16/758,329
Filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Munich (DE)
PCT Filed Oct. 23, 2018, PCT No. PCT/EP2018/079046
§ 371(c)(1), (2) Date Jun. 10, 2020,
PCT Pub. No. WO2019/081514, PCT Pub. Date May 2, 2019.
Claims priority of application No. 102017124692.4 (DE), filed on Oct. 23, 2017; and application No. 102018102416.9 (DE), filed on Feb. 2, 2018.
Prior Publication US 2020/0340105 A1, Oct. 29, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/26 (2006.01); C23C 28/04 (2006.01); C23C 28/00 (2006.01); C23C 16/00 (2006.01); C23C 16/02 (2006.01); C23C 16/22 (2006.01)
CPC C23C 16/26 (2013.01) [C23C 16/00 (2013.01); C23C 16/0272 (2013.01); C23C 16/22 (2013.01); C23C 28/00 (2013.01); C23C 28/046 (2013.01); Y10T 428/31663 (2015.04)] 34 Claims
OG exemplary drawing
 
1. A carbonaceous coating for a passive electrical component for protecting the passive electrical component from an attack by ammonia comprising:
(i) a sol-gel layer which is producible or has been produced by a sol-gel method or
(ii) a plasma-polymeric layer which is producible or has been produced by plasma-activated chemical vapor deposition;
wherein each of (i) the sol-gel layer or (ii) the plasma polymeric layer has a surface facing away from the passive electrical component, and
comprises a carbon content of 50 to 90 atom % at a depth of 80 nm below the surface and as measured by and based on a total number of atoms detected by XPS, or
comprises an organometallic layer comprising a carbon content of 2 to 50 atom % at a depth of 80 nm below the surface and as measured by and based on the total number of atoms detected by XPS; wherein
each of (i) the sol-gel layer or (ii) the plasma polymeric layer has at least one hydrolyzable group on the surface, the at least one hydrolyzable group being selected from the group consisting of ester, amide, urethane and urea groups, and
(i) the sol-gel layer comprises a hydrolyzable carbon content of ≤15 atom % or (ii) the plasma-polymeric layer comprises a hydrolyzable carbon content of ≤10 atom %, wherein hydrolyzable carbon content is the portion of carbon within the at least one hydrolyzable group on the surface relative to the total carbon content on the surface as measured by XPS with C1s peak fitting.