CPC C23C 14/20 (2013.01) [C23C 14/0063 (2013.01); C23C 14/0652 (2013.01); C23C 14/08 (2013.01); C23C 14/10 (2013.01); G01B 7/16 (2013.01); G01L 1/22 (2013.01); G01L 1/2281 (2013.01)] | 7 Claims |
1. A strain gauge comprising:
a flexible substrate;
a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate; and
a resistor formed of a film that includes Cr, CrN, and Cr2N and that is formed with α-Cr as a main component,
wherein the functional layer includes a function of promoting crystal growth of α-Cr and forming an α-Cr based film.
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