US 11,702,695 B2
Self assembled patterning using patterned hydrophobic surfaces
Yir-Shyuan Wu, Albany, CA (US); Yan-You Lin, Fremont, CA (US); M. Shane Bowen, San Diego, CA (US); Cyril Delattre, San Diego, CA (US); Fabien Abeille, Grenoble (FR); Tarun Khurana, Fremont, CA (US); Arnaud Rival, Grenoble (FR); Poorya Sabounchi, Atherton, CA (US); Dajun Yuan, San Diego, CA (US); and Maria Candelaria Rogert Bacigalupo, San Diego, CA (US)
Assigned to Illumina, Inc., San Diego, CA (US)
Filed by Illumina, Inc., San Diego, CA (US)
Filed on May 5, 2022, as Appl. No. 17/662,124.
Application 17/662,124 is a continuation of application No. 17/153,379, filed on Jan. 20, 2021, granted, now 11,332,788.
Application 17/153,379 is a continuation of application No. 16/096,669, granted, now 10,900,076, issued on Jan. 26, 2021, previously published as PCT/US2017/033169, filed on May 17, 2017.
Claims priority of provisional application 62/338,394, filed on May 18, 2016.
Prior Publication US 2022/0275443 A1, Sep. 1, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. B05D 3/06 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); C12Q 1/6874 (2018.01); C12Q 1/6806 (2018.01)
CPC C12Q 1/6874 (2013.01) [B05D 3/06 (2013.01); C12Q 1/6806 (2013.01); G03F 7/0002 (2013.01); G03F 7/20 (2013.01)] 22 Claims
 
1. A method for preparing a patterned surface for analytic applications, comprising:
providing a solid support having a surface covered by a continuous hydrophobic coating layer, wherein the hydrophobic coating layer is in direct contact with the surface or the hydrophobic coating layer is in contact with the surface via a first adhesion promoting layer;
disposing a photoresist layer and a second adhesion promoting layer on the hydrophobic coating layer of the solid support, wherein the photoresist layer is in contact with the hydrophobic coating layer via the second adhesion promoting layer;
patterning the photoresist layer to form micro-scale or nano-scale contours on the surface separated by hydrophobic interstitial regions; and
etching off the hydrophobic coating layer in at least a portion of the micro-scale or nano-scale contours;
depositing a layer of a gel material within the micro-scale or nano-scale contours.