CPC C09G 1/02 (2013.01) [C09K 3/1436 (2013.01); H01L 21/31053 (2013.01)] | 18 Claims |
1. A slurry comprising:
abrasive grains;
a liquid medium; and
a salt of a compound represented by formula (1) below
in formula (1), R represents a hydroxyl group or a monovalent organic group, wherein
the abrasive grains include first particles and second particles in contact with the first particles,
the first particles contain cerium oxide,
the second particles contain a hydroxide of a tetravalent metal element,
the average particle size of the second particles is smaller than the average particle size of the first particles,
the average secondary particle size of the abrasive grains is more than 100 nm,
the salt of the compound represented by formula (1) contains at least one selected from the group consisting of a compound represented by formula (2) below and a compound represented by formula (3) below
in formula (2), R represents a hydroxyl group or a monovalent organic group, and X+ represents an ammonium ion,
in formula (3), R represents a hydroxyl group or a monovalent organic group, and X+ represents an ammonium ion, and
pH of the slurry is 7.0 or lower.
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