CPC B65G 54/02 (2013.01) [B65G 47/905 (2013.01); H01L 21/67161 (2013.01); H01L 21/67706 (2013.01)] | 19 Claims |
1. A substrate treating apparatus comprising:
a transport chamber having a long shape on one side, and for providing a moving space of a substrate;
a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process;
a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber;
a track provided in the transport chamber to provide a moving path of a substrate, the track extending from the transport chamber to the inside of the load lock chamber; and
a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.
|