US 11,702,299 B2
Transport robot and substrate treating apparatus comprising the same
Sang-Oh Kim, Seoul (KR); Jun Ho Song, Gyeonggi-do (KR); Myungjin Lee, Gyeonggi-do (KR); and Heejae Byun, Gyeonggi-do (KR)
Assigned to Semes Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Jun. 25, 2020, as Appl. No. 16/911,779.
Claims priority of application No. 10-2019-0076321 (KR), filed on Jun. 26, 2019.
Prior Publication US 2020/0407179 A1, Dec. 31, 2020
Int. Cl. B65G 54/02 (2006.01); B65G 47/90 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01)
CPC B65G 54/02 (2013.01) [B65G 47/905 (2013.01); H01L 21/67161 (2013.01); H01L 21/67706 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A substrate treating apparatus comprising:
a transport chamber having a long shape on one side, and for providing a moving space of a substrate;
a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process;
a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber;
a track provided in the transport chamber to provide a moving path of a substrate, the track extending from the transport chamber to the inside of the load lock chamber; and
a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.