US 11,695,150 B2
Semiconductor structures having a micro-battery and methods for making the same
Chyi-Tsong Ni, Hsin-Chu (TW); I-Shi Wang, Taipei County (TW); Yi Hsun Chiu, Hsinchu County (TW); and Ching-Hou Su, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Aug. 19, 2021, as Appl. No. 17/406,933.
Application 16/449,522 is a division of application No. 14/994,279, filed on Jan. 13, 2016, granted, now 10,361,449, issued on Jul. 23, 2019.
Application 14/994,279 is a division of application No. 13/741,829, filed on Jan. 15, 2013, granted, now 9,240,611, issued on Jan. 19, 2016.
Application 17/406,933 is a continuation of application No. 16/449,522, filed on Jun. 24, 2019, granted, now 11,101,491.
Prior Publication US 2021/0384544 A1, Dec. 9, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H01M 10/04 (2006.01); H01M 4/04 (2006.01); H01M 4/13 (2010.01); H01M 10/052 (2010.01); H01M 10/0585 (2010.01); H01M 6/40 (2006.01); H01M 10/02 (2006.01)
CPC H01M 10/0436 (2013.01) [H01M 4/0421 (2013.01); H01M 4/13 (2013.01); H01M 6/40 (2013.01); H01M 10/02 (2013.01); H01M 10/049 (2013.01); H01M 10/052 (2013.01); H01M 10/0585 (2013.01); H01M 2010/0495 (2013.01); H01M 2220/30 (2013.01); Y10T 29/49114 (2015.01)] 20 Claims
OG exemplary drawing
 
1. A micro-battery structure comprising:
a first substrate;
a second substrate bonded with the first substrate such that a cavity is disposed between the first and second substrates;
a first electrode disposed on the first substrate within the cavity, the first electrode including a first fin extending within the cavity towards the second substrate, the first fin having opposing sidewall surfaces and an end surface extending between the opposing sidewall surfaces and facing the second substrate;
a second electrode disposed on the second substrate within the cavity, the second electrode having a second fin extending within the cavity towards the first substrate, the second fin having opposing sidewall surfaces and an end surface extending between the opposing sidewall surfaces and facing the first substrate, wherein one of the sidewalls of the second fin faces one of the sidewalls of the first fin; and
a electrolyte disposed in the cavity between the first electrode and the second electrode.