US 11,693,326 B1
System and method for dynamically controlling temperature of thermostatic reticles
Tzu-Jung Pan, New Taipei (TW); Sheng-Kang Yu, Hsinchu (TW); Shang-Chieh Chien, New Taipei (TW); Li-Jui Chen, Hsinchu (TW); and Heng-Hsin Liu, New Taipei (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Hsinchu (TW)
Filed on Mar. 11, 2022, as Appl. No. 17/692,356.
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70875 (2013.01) [G03F 7/705 (2013.01); G03F 7/70525 (2013.01); G03F 7/70891 (2013.01)] 20 Claims
OG exemplary drawing
 
8. A system for dynamically controlling a temperature of a thermostatic reticle, comprising:
a thermostatic reticle assembly, comprising:
a reticle,
at least one temperature sensor in proximity to the reticle, and
at least one heating element;
a thermostat component in communication with the at least one temperature sensor and the at least one heating element; and
a controller comprising a processor in communication with memory storing instructions which are executed by the processor to:
receive, from the at least one temperature sensor by the thermostat component, a current temperature of the reticle,
retrieve, from an associated database, a steady-state temperature corresponding to the reticle, and
activate, via the thermostat component, the at least one heating element in response to preheat the reticle to the retrieved steady-state temperature in accordance with the current temperature of the reticle,
activate a gas flow valve positioned within a gas supply line subsequent to activating the at least one heating element, wherein the at least one heating element positioned adjacent to the gas supply line to heat a gas transiting therethrough, and
closing the gas flow valve subsequent to deactivating the at least one heating element.