CPC G03F 7/70875 (2013.01) [G03F 7/705 (2013.01); G03F 7/70525 (2013.01); G03F 7/70891 (2013.01)] | 20 Claims |
8. A system for dynamically controlling a temperature of a thermostatic reticle, comprising:
a thermostatic reticle assembly, comprising:
a reticle,
at least one temperature sensor in proximity to the reticle, and
at least one heating element;
a thermostat component in communication with the at least one temperature sensor and the at least one heating element; and
a controller comprising a processor in communication with memory storing instructions which are executed by the processor to:
receive, from the at least one temperature sensor by the thermostat component, a current temperature of the reticle,
retrieve, from an associated database, a steady-state temperature corresponding to the reticle, and
activate, via the thermostat component, the at least one heating element in response to preheat the reticle to the retrieved steady-state temperature in accordance with the current temperature of the reticle,
activate a gas flow valve positioned within a gas supply line subsequent to activating the at least one heating element, wherein the at least one heating element positioned adjacent to the gas supply line to heat a gas transiting therethrough, and
closing the gas flow valve subsequent to deactivating the at least one heating element.
|